NSF Org:	CMMI Division of Civil, Mechanical, and Manufacturing Innovation
Recipient:	FLORIDA ATLANTIC UNIVERSITY
Initial Amendment Date:	August 18, 1986
Latest Amendment Date:	August 18, 1986
Award Number:	8616753
Award Instrument:	Standard Grant
Program Manager:	K. (Cheena) Srinivasan CMMI  Division of Civil, Mechanical, and Manufacturing Innovation ENG  Directorate for Engineering
Start Date:	August 15, 1986
End Date:	January 31, 1988 (Estimated)
Total Intended Award Amount:	$29,955.00
Total Awarded Amount to Date:	$29,955.00
Funds Obligated to Date:	FY 1986 = $29,955.00
History of Investigator:	Tsung-Chow Su (Principal Investigator) Su@fau.edu
Recipient Sponsored Research Office:	Florida Atlantic University 777 GLADES RD BOCA RATON FL  US  33431-6424 (561)297-0777
Sponsor Congressional District:	23
Primary Place of Performance:	DATA NOT AVAILABLE
Primary Place of Performance Congressional District:
Unique Entity Identifier (UEI):	Q266L2NDAVP1
Parent UEI:
NSF Program(s):	Manufacturing Machines & Equip
Primary Program Source:
Program Reference Code(s):	9237
Program Element Code(s):	146800
Award Agency Code:	4900
Fund Agency Code:	4900
Assistance Listing Number(s):	47.041

ABSTRACT

An exploratory study will be conducted into the dynamics of air flow in the microelectronics clean room as it interacts with the process automation equipment to determine if this approach can eventually lead to improved clean room design with a high level of contamination control. This study will examine fluid dynamics of clean room operations, including the consideration of robots as a source of contamination and the effect of robot movement and work station design on the aerosol dispersion in the clean room. Development of a simulation computer program of robots and end effectors as particle generators is planned, as well as a simulation program of a clean room with graphic output showing three-dimensional particle concentration in the room.

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