| NSF Org: |
CMMI Division of Civil, Mechanical, and Manufacturing Innovation |
| Recipient: |
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| Initial Amendment Date: | August 29, 2019 |
| Latest Amendment Date: | September 7, 2022 |
| Award Number: | 1919539 |
| Award Instrument: | Standard Grant |
| Program Manager: |
Wendy C. Crone
CMMI Division of Civil, Mechanical, and Manufacturing Innovation ENG Directorate for Engineering |
| Start Date: | September 1, 2019 |
| End Date: | August 31, 2022 (Estimated) |
| Total Intended Award Amount: | $466,902.00 |
| Total Awarded Amount to Date: | $466,902.00 |
| Funds Obligated to Date: |
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| History of Investigator: |
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| Recipient Sponsored Research Office: |
2425 CAMPUS RD SINCLAIR RM 1 HONOLULU HI US 96822-2247 (808)956-7800 |
| Sponsor Congressional District: |
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| Primary Place of Performance: |
2440 Campus Road, Box 368 Honolulu HI US 96822-2344 |
| Primary Place of
Performance Congressional District: |
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| Unique Entity Identifier (UEI): |
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| Parent UEI: |
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| NSF Program(s): | Major Research Instrumentation |
| Primary Program Source: |
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| Program Reference Code(s): |
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| Program Element Code(s): |
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| Award Agency Code: | 4900 |
| Fund Agency Code: | 4900 |
| Assistance Listing Number(s): | 47.041 |
ABSTRACT
This Major Research Instrumentation (MRI) award supports the acquisition of a state-of-the-art high-speed maskless lithography tool to enable fundamental research in microscale and nanoscale science and engineering at the University of Hawaii at Manoa (UHM). The instrumentation will enable new research collaborations--both within the University and with the broader community--in microfluidics, sensors, nanosystems, and biomedical systems. Fabrication of sophisticated, multiplexed, scalable microfluidic and nanofluidic devices will enable advancement of reconfigurable liquid-metal-based electrical circuits, in vitro testing of drug delivery, chemical-enhanced oil recovery, and water purification. The MRI award creates new opportunities for science and engineering training through hands-on student research projects and enhanced outreach activities, particularly for Native Hawaiian and Pacific Islander students.
The ability to generate high-resolution, controlled mechanical and electrical interfaces is essential for research in engineering, biosciences, and applied physics. The advanced fabrication pathways established by this award will enable fundamental research on nanosystems, energy transport, and manufacturing of reconfigurable devices. Precise lithographic patterning achieved with the instrumentation allows study of fundamental energy transport properties and behaviors, which are needed to expand the library of materials for energy conversion and storage. Patterning of electrodes and other material structures also offers the means to elucidate electrical effects on nanomaterial surface properties, which are fundamental to advancing device miniaturization in nanomanufacturing. Rapid large-scale patterning of microfluidic structures enables research in manufacturing of highly deformable structures and advanced optical features that are needed for wearable biomedical sensors.
This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.
PUBLICATIONS PRODUCED AS A RESULT OF THIS RESEARCH
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PROJECT OUTCOMES REPORT
Disclaimer
This Project Outcomes Report for the General Public is displayed verbatim as submitted by the Principal Investigator (PI) for this award. Any opinions, findings, and conclusions or recommendations expressed in this Report are those of the PI and do not necessarily reflect the views of the National Science Foundation; NSF has not approved or endorsed its content.
The high-speed Heidelberg MLA150 maskless lithography tool was installed and commissioned in May 2021, in the College of Engineering clean room housed at the Pacific Ocean Science and Technology building on the flagship Manoa campus of the University of Hawaii (UH). In pursuit of this acquisition, the University provided more than $150k of renovations to its microfabrication facilities, including upgrades to the clean-room compressed air supply and deionized water supply, operation of a compressed nitrogen supply, and provision of a backup electrical power supply for the new instrument. The capabilities of the new MLA150 instrument enable fundamental research in microscale and nanoscale science and engineering at UH. It enables new research collaborations in microfluidics, sensors, nanosystems, and biomedical systems. More than 15 students and faculty have been trained in operation of the new MLA150 equipment, training documentation has been collected, and a training website has been started. Intellectual Merit: Acquisition of a high-speed maskless lithography tool anchors the operation of the University of Hawaii clean room, and supports applied materials and biomedical research activities across numerous groups at the University of Hawaii. Broader Impacts: Acquisition of this equipment enables many projects for student research and training, including for the significant population of students at UH who come from underrepresented groups. Furthermore, the presence of this tool at the University has helped to raise additional federal funds (AFOSR DURIP) for acquisition of other microfabrication tools. So far, the MLA150 tool has been used in at least 1 paper currently under review for publication.
Last Modified: 12/16/2022
Modified by: Joseph J Brown
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