Award Abstract # 1407765
Understanding the Nature of Interfaces in Two Dimensional Electronic Devices(UNITE)
NSF Org: |
ECCS
Division of Electrical, Communications and Cyber Systems
|
Recipient: |
UNIVERSITY OF TEXAS AT DALLAS
|
Initial Amendment Date:
|
July 21, 2014 |
Latest Amendment Date:
|
July 21, 2014 |
Award Number: |
1407765 |
Award Instrument: |
Standard Grant |
Program Manager: |
Dimitris Pavlidis
ECCS
Division of Electrical, Communications and Cyber Systems
ENG
Directorate for Engineering
|
Start Date: |
September 1, 2014 |
End Date: |
May 31, 2018 (Estimated) |
Total Intended Award
Amount: |
$420,000.00 |
Total Awarded Amount to
Date: |
$420,000.00 |
Funds Obligated to Date:
|
FY 2014 = $420,000.00
|
History of Investigator:
|
-
Robert
Wallace
(Principal Investigator)
rmwallace@utdallas.edu
-
Christopher
Hinkle
(Co-Principal Investigator)
-
Chadwin
Young
(Co-Principal Investigator)
|
Recipient Sponsored Research
Office: |
University of Texas at Dallas
800 WEST CAMPBELL RD.
RICHARDSON
TX
US
75080-3021
(972)883-2313
|
Sponsor Congressional
District: |
24
|
Primary Place of
Performance: |
University of Texas at Dallas
TX
US
75080-3021
|
Primary Place of
Performance Congressional District: |
24
|
Unique Entity Identifier
(UEI): |
EJCVPNN1WFS5
|
Parent UEI: |
|
NSF Program(s): |
EPMD-ElectrnPhoton&MagnDevices
|
Primary Program Source:
|
01001415DB NSF RESEARCH & RELATED ACTIVIT
|
Program Reference
Code(s): |
100E
|
Program Element Code(s):
|
151700
|
Award Agency Code: |
4900
|
Fund Agency Code: |
4900
|
Assistance Listing
Number(s): |
47.041
|
ABSTRACT

The ability to reduce the size of the basic switch in computers, the transistor, is being seriously challenged. Materials that have been used for decades, such as silicon, are anticipated to soon reach the limit of their performance. This will impact applications where reduced power is needed, along with high speed switching, such as portable electronics and cell phones, as well as larger power intensive operations, like data storage and server centers. The collaborative international team of researchers in this program will focus on determining the feasibility of using the ultimate limit for such switches: atomically-thin, two-dimensional (2D) layers. The materials to be studied, called "transition metal dichalcogenides," are unique when produced in atomically thin sheets, and exhibit promising properties that may enable efficient low power, high performance computing. A key property that will be studied is the surface and interfaces of these materials as they are combined to form the transistor, and how the chemical and physical properties of these interfaces impact and improve the transistor electrical switching behavior. The research results could enable the possibility of reducing the power consumption associated with the broad spectrum of electronic devices, which drive the information and communication age. This will be good for society in terms of extended battery life in portable devices and also good for the environment in terms of reducing the total electrical energy consumed by information and communication technologies. The project, entitled "Understanding the Nature of Interfaces in Two-Dimensional Electronic Devices (UNITE)," brings together leading researchers from the USA, the Republic of Ireland and Northern Ireland, each funded by their respective government agencies through the US Ireland R&D Partnership Program. The project will provide training to five graduate students in the USA and Ireland, and will include student exchanges between the Institutes providing a broader scientific and cultural experience for the graduate students supported through the project.
The UNITE project will investigate the synthesis, device fabrication and characterization of 2D transition metal dichalcogenides semiconductors for applications in low voltage tunnel field effect transistors. We will explore two separate routes to large area synthesis through van der Waals epitaxy and atomic layer deposition. In parallel, characterization and understanding of the surfaces and interfacial regions between commercially available bulk crystals and technologically relevant contacts and insulators will be conducted. This will be accomplished using a combination of in-situ and ex-situ characterization covering questions such as: how can 2D semiconductor surfaces be functionalized to allow uniform and continuous oxide thin films to be formed by atomic layer deposition; can capacitance-voltage based metrology be applied to metal-oxide-semiconductor systems on 2D semiconductor surfaces; what is the nature of conduction for metal contacts on 2D semiconductors; and how are the atomic scale electrical properties related to larger area contacts' It is noted that the development of growth methods for large area substrates will not only demonstrate the potential to move 2D semiconductor based transistors from research to production, but will also provide a source of technologically interesting 2D semiconductor materials for basic study which are not commonly available through geological sources. Finally, the growth and characterization studies will be applied to the fabrication of a tunnel field effect transistor based on two dimensional semiconductor heterostructures. If the UNITE team can successfully understand the issues relating to large area 2D synthesis, uniform insulator deposition, ohmic contact formation, and charge transport in single or few layer 2D semiconductors, this knowledge will be relevant to a range of potential device architectures.
PUBLICATIONS PRODUCED AS A RESULT OF THIS RESEARCH

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(Showing: 1 - 10 of 51)
(Showing: 1 - 51 of 51)
A. Khosravi, R. Addou, C. M. Smyth, R. Yue, C. R. Cormier, J. Kim, C. L. Hinkle, and R. M. Wallace
"Covalent Nitrogen Doping in MBE and Bulk WSe2"
APL Materials
, v.6
, 2018
, p.026603
10.1063/1.5002132
A. T. Barton, R. Yue, L. A. Walsh, H. Zhu, L. Cheng, N. Lu, R. Addou, S. McDonnell, J. W. P. Hsu, J. Kim, M. J. Kim, L. Colombo, R. M. Wallace, and C. L. Hinkle
"MBE growth of layered 2D semiconductor heterostructures: Transition metal dichalcogenides and topological insulators"
46th IEEE Semiconductor Interface Specialists Conference Abstracts
, 2015
C. D Young, P. Bolshakov, P. Zhao, C. Smyth, A. Khosravi, P. K. Hurley, C. L Hinkle, and R. MWallace
"Investigation of Critical Interfaces in Few-Layer MoS2 Field Effect Transistors with High-k Dielectrics 2D and Beyond Materials and Devices (Invited - US/Ireland Joint Publication)"
ECS Transactions
, v.80
, 2017
, p.219
10.1149/08001.0219ecst
C. D. Young, P. Bolshakov, R. A. Rodriguez-Davila, P. Zhao, A. Khosravi, I. Mejia, M. Quevedo-Lopez, C. L. Hinkle, and R. M. Wallace
"Electrical characterization of process induced effects on non-silicon devices"
2018 International Conference on IC Design & Technology (ICICDT)
, 2018
, p.173
10.1109/ICICDT.2018.8399784
C. D. Young, P. Zhao, P. Bolshakov-Barrett, A. Azcatl, P. Hurley, Y. Gomeniuk, M. Schmidt, C. L. Hinkle, and R. M. Wallace
"Evaluation of Few-Layer MoS2 Transistors with a Top Gate and HfO2 Dielectric (Invited - US/Ireland Joint Publication)"
ECS Transactions
, v.75
, 2016
, p.153
10.1149/07505.0153ecst
C. D. Young, P. Zhao, P. Bolshakov-Barrett, A. Azcatl, P. Hurley, Y. Gomeniuk, M. Schmidt, C. L. Hinkle, and R. M. Wallace
"Evaluation of Few-Layer MoS2 Transistors with a Top Gate and HfO2 Dielectric (Invited - US/Ireland JointPublication"
ECS Transactions
, v.75
, 2016
, p.153
10.1149/07505.0153ecst
Christopher M. Smyth, Rafik Addou, Stephen McDonnell, Christopher L. Hinkle, Robert M. Wallace,
"Contact Metal?MoS2 Interfacial Reactions and Potential Implications on MoS2-Based Device Performance"
The Journal of Physical Chemistry C
, v.120
, 2016
, p.14719
10.1021/acs.jpcc.6b04473
C. M. Smyth, R. Addou, S. McDonnell, C. L. Hinkle, R. M. Wallace
"Contact Metal?MoS2 Interfacial Reactionsand Potential Implications on MoS2-Based Device Performance"
Journal of Physical Chemistry C
, v.120
, 2016
, p.14719
10.1021/acs.jpcc.6b04473
C. Smyth, R. Addou, S. McDonnell, C. Hinkle, R.M. Wallace
"WSe2 ¬Contact Metal Interface Chemistry and Band Alignment under High Vacuum and Ultra High Vacuum Deposition Conditions"
2D Materials
, v.4
, 2017
, p.025284
10.1088/2053-1583/aa6bea
C. Smyth, R. Addou, S. McDonnell, C. Hinkle, R.M. Wallace
"WSe2 ¬Contact Metal Interface Chemistry and Band Alignment under High Vacuum and Ultra High Vacuum Deposition Conditions"
2D Materials
, v.4
, 2017
, p.025284
10.1088/2053-1583/aa6bea
H. Dong, C. Gong, R. Addou, S. McDonnell, A. Azcatl, X. Qin, W. Wang, W-H. Wang, C. L. Hinkle, R.M. Wallace
"Schottky barrier height of Pd/MoS2 contact by large area photoemission spectroscopy"
ACS Applied Materials and Interfaces
, v.9
, 2017
, p.38977
10.1021/acsami.7b10974
Hui Zhu, Xiaoye Qin, Lanxia Cheng, Angelica Azcatl, Jiyoung Kim, Robert M. Wallace
"Remote plasma oxidation and atomic layer etching of MoS2"
ACS Applied Materials and Interfaces
, v.8
, 2016
, p.19119
http://dx.doi.org/10.1021/acsami.6b04719
H. Zhu, S. McDonnell, X.Qin, A. Azcatl, L. Cheng, R. Addou, J. Kim, P. D. Ye and R. M. Wallace
"Al2O3 on Black Phosphorus by Atomic Layer Deposition: An in situ Interface Study"
ACS Applied Materials and Interfaces
, v.7
, 2015
, p.12038
10.1021/acsami.5b03192
H. Zhu, S. McDonnell, X.Qin, A. Azcatl, L. Cheng, R. Addou, J. Kim, P. D. Ye and R. M. Wallace,
""Al2O3 on Black Phosphorus by Atomic Layer Deposition: An in situ Interface Study,""
ACS Applied Materials and Interfaces
, v.7
, 2015
, p.13038
10.1021/acsami.5b03192
H. Zhu, X. Qin, A. Azcatl, R. Addou, S. McDonnell, P. Ye and R. M. Wallace
"Surface and interfacial study of halfcycle atomic layer deposited Al2O3 on black phosphorus"
Microelectronics Engineering
, v.147
, 2015
, p.1
10.1016/j.mee.2015.04.014
H. Zhu, X. Qin, L. Cheng, A. Azcatl, J. Kim, and R. M. Wallace
"Remote plasma oxidation and atomic layer etching of MoS2"
ACS Applied Materials and Interfaces
, v.8
, 2016
, p.19119
10.1021/acsami.6b04719
L.A. Walsh, A.J. Green, R. Addou, W. Nolting, C.R. Cormier, A.T. Barton, T.R. Mowll, R. Yue, N. Lu, J. Kim, M.J. Kim, V.P. LaBella, C.A. Ventrice, Jr., S. McDonnell, W.G. Vandenberghe,R.M. Wallace, A. Diebold, and C.L. Hinkle
"Fermi Level Manipulation Through Native Doping in the Topological Insulator Bi2Se3"
ACS Nano
, v.12
, 2018
, p.6310
10.1021/acsnano.8b03414
L. A. Walsh and C. L. Hinkle
"van der Waals Epitaxy: 2D Materials and Topological Insulators (Invited Review)"
Applied Materials Today
, v.9
, 2017
, p.504
10.1016/j.apmt.2017.09.010
L.A. Walsh, C.M. Smyth, A.T. Barton, Q.Wang, Z.Che, R.Yue, J.Kim, M.J. Kim, R.M. Wallace, and C.L. Hinkle
"Interface Chemistry of Contact Metals and Ferromagnets on the Topological Insulator Bi2Se3"
Journal of Physical Chemistry C
, v.121
, 2017
, p.38977
10.1021/acs.jpcc.7b08480
L. A. Walsh, R. Yue, A. T. Barton, H. Zhu, L. Cheng, N. Lu, R. Addou, J. Hsu, S. McDonnell, J. Kim, M. J. Kim, L. Colombo, R. M. Wallace, C. L. Hinkle
"van der Waals Epitaxy for Novel Low-power Electronics"
31st North American Molecular Beam Epitaxy Conference Abstracts
, 2015
L. Walsh, R. Yue, Q. Wang, A. Barton, R. Addou, C. M. Smyth, Christopher; H. Zhu, J. Kim, L. Colombo, M. J. Kim, R.M. Wallace, C. L. Hinkle
"WTe2 thin films grown by beam-interrupted molecular beam epitaxy"
2D Materials
, v.4
, 2017
, p.025044
10.1088/2053-1583/aa61e1
L. Walsh, R. Yue, Q. Wang, A. Barton, R. Addou, C. M. Smyth, Christopher; H. Zhu, J. Kim, L. Colombo, M. J. Kim, R.M.Wallace, C. L. Hinkle
"WTe2 thin films grown by beam-interrupted molecular beam epitaxy."
2D Materials
, v.4
, 2017
, p.024044
10.1088/2053-1583/aa61e1
P. Bolshakov, A. Khosravi, P. Zhao, P. K. Hurley, C. L. Hinkle, R. M. Wallace, and C. D Young
"Dual-Gate MoS2 Transistors with sub-10 nm Top-Gate High-k Dielectrics (US/Ireland Joint Publication)"
Applied Physics Letters
, v.112
, 2018
, p.253502
10.1063/1.5027102
P. Bolshakov, P. Zhao, A. Azcatla, P. K. Hurley, R. M. Wallace, C.D. Young
"Electrical characterization of top-gated molybdenum disulfide field-effect-transistors with high-k dielectrics (Joint US/Ireland Publication)"
Microelectronic Engineering
, v.178
, 2017
, p.190
10.1016/j.mee.2017.04.045
P. Bolshakov, P. Zhao, A. Azcatla, P. K. Hurley, R. M. Wallace, C.D. Young
"Electrical characterization of top-gatedmolybdenum disulfide field-effect-transistors with high-k dielectrics (Joint US/Ireland Publication)"
Microelectronic Engineering
, v.178
, 2017
, p.190
10.1016/j.mee.2017.04.045
P. Bolshakov, P. Zhao, A. Azcatl, P. K. Hurley, R. M. Wallace, and C. D. Young
"Improvement in Top-Gated MoS2 Transistor Performance due to High Quality Backside Al2O3 Layer (US/Ireland Joint Publication)"
Applied Physics Letters
, v.111
, 2017
, p.032110
10.1063/1.4995242
P. Bolshakov, P. Zhao, A. Azcatl, P. K. Hurley, R. M. Wallace, and C. D. Young
"Improvement in Top-Gated MoS2Transistor Performance due to High Quality Backside Al2O3 Layer (US/Ireland Joint Publication)"
Applied PhysicsLetters
, v.111
, 2017
, p.032110
10.1063/1.4995242
Peng Zhao, Angelica Azcatl, Yuri Y. Gomeniuk, Pavel Bolshakov-Barrett, Michael Schmidt,Stephen J. McDonnell, Paul K. Hurley, Robert M. Wallace, and Chadwin D. Young
"Electrically Probing Interface Defects in the Metal / HfO2 / MoS2 Gate Stack (Joint US/Ireland Publication)"
ACS Applied Materials & Interfaces
, v.9
, 2017
, p.24348
10.1021/acsami.7b06204
P. Zhao, A. Azcatl, P. Bolshakov-Barrett, P. K. Hurley, R. M. Wallace, and C. D. Young
"Top-Gated, Few-Layer MoS2 Field Effect Transistors with In-situ UV-Ozone Surface Functionalization and Sub-10nm HfO2 Dielectric"
IEEE Semiconductor Interface Specialists Conference Abstracts
, 2015
P. Zhao, A. Azcatl, P. Bolshakov-Barrett, R. M. Wallace, C. D. Young and P. K. Hurley
"Top-gated MoS2 capacitors and transistors with high-k dielectrics for interface study (US/Ireland Joint Conference Paper)"
2016 International Conference on Microelectronic Test Structures (ICMTS), Yokohama, JAPAN
, 2016
, p.172
10.1109/ICMTS.2016.7476201
P. Zhao, A. Azcatl, P. Bolshakov-Barrett, R. M. Wallace, C. D. Young, and P. K. Hurley
"Top-gated MoS2 capacitors and transistors with high-k dielectrics for interface study"
2016 International Conference on Microelectronic Test Structures (ICMTS)
, 2015
, p.172
10.1109/ICMTS.2016.7476201
P. Zhao, A. Azcatl, P. Bolshakov, J. Moon, and C. L. Hinkle, P. K. Hurley, R. M. Wallace, and C. D. Young
"Effects of annealing on top-gated MoS2 transistors with HfO2 dielectric (Joint US/Ireland Publication)"
Journal of Vacuum Science and Technology B
, v.35
, 2017
, p.01A118
10.1116/1.4974220
P. Zhao, A. Azcatl, P. Bolshakov, J. Moon, and C. L. Hinkle, P. K. Hurley, R. M. Wallace, and C. D. Young
"Effects of annealing on top-gated MoS2 transistors with HfO2 dielectric (Joint US/Ireland Publication)."
Journal of Vacuum Science and Technology B
, v.35
, 2017
, p.01A118
10.1116/1.4974220
P. Zhao, A. Azcatl, Y.Y. Gomeniuk, P. Bolshakov-Barrett, M. Schmidt,S. J. McDonnell, P. K. Hurley, R. M. Wallace, and C. D. Young
"Electrically Probing Interface Defects in the Metal / HfO2 /MoS2 Gate Stack (Joint US/Ireland Publication)"
ACS Applied Materials & Interfaces
, v.9
, 2017
, p.24348
10.1021/acsami.7b06204
P. Zhao, A. Khosravi, A. Azcatl, P. Bolshakov, G. Mirabelli, E. Caruso, C.L. Hinkle, P.K. Hurley, R.M.Wallace, C.D.Young
"Evaluation of border traps and interface traps in HfO2/MoS2 gate stacks by capacitance - voltage analysis (US/Ireland Joint Publication)"
2D Materials
, v.5
, 2018
, p.031002
10.1088/2053-1583/aab728
P. Zhao, P.B. Vyas, S. McDonnell, P. Bolshakov-Barrett, A. Azcatl, C.L. Hinkle, P.K. Hurley, R.M. Wallace, C.D. Young
"Electrical characterization of top-gated molybdenum disulfide metal?oxide?semiconductor capacitors withhigh-k dielectrics"
Microelectronics Engineering
, v.147
, 2015
, p.151
10.1016/j.mee.2015.04.078
R. Addou and R. M.Wallace
"Integration of 2D Materials for Advanced Devices: Challenges and Opportunities"
ECS Transactions
, v.79
, 2017
, p.11
10.1149/07901.0011ecs
R. Addou and R. M.Wallace
"Integration of 2D Materials for Advanced Devices: Challenges and Opportunities (Invited)"
ECS Transactions
, v.79
, 2017
, p.11
10.1149/07901.0011ecs
R. Addou and R.M.Wallace
"Surface Analysis of WSe2 Crystals: Spatial and Electronic Variability"
ACS Applied Materials and Interfaces
, v.8
, 2016
, p.26400
10.1021/acsami.6b08847
R. Addou and R.M.Wallace
"Using Photoelectron Spectroscopy in the Integration of 2D Materials for Advanced Devices (Invited Review)"
Journal of Electron Spectroscopy and Related Phenomenon
, 2018
10.1016/j.elspec.2018.01.006
R. Addou, C. Smyth, J-Y. Noh, Y-C. Lin, Y. Pan, S. Eichfeld, S. Fölsch, J.A. Robinson, K. Cho, R. Feenstra, R. M. Wallace
"One dimensional metallic edges in atomically thin WSe2 induced by air exposure"
2D Materials
, v.5
, 2018
, p.025017
10.1088/2053-1583/aab0cd
R. Addou, S. McDonnell, D. Barrera, Z. Guo, A. Azcatl, J. Wang, H. Zhu, C. L. Hinkle, M. Quevedo-Lopez, H. N Alshareef, L. Colombo, J. W. P. Hsu, and R. M. Wallace
"Impurities and Electronic Property Variations of Natural MoS2 Crystal Surfaces"
ACS Nano
, v.9
, 2015
, p.9124
10.1021/acsnano.5b03309
Rafik Addou, Stephen McDonnell, Diego Barrera, Zaibing Guo, Angelica Azcatl,Jian Wang, Hui Zhu, Christopher L. Hinkle, Manuel Quevedo-Lopez, Husam NAlshareef, Luigi Colombo, Julia W. P. Hsu, and Robert M. Wallace
"Impurities and Electronic Property Variations of Natural MoS2 Crystal Surfaces"
ACS Nano
, v.9
, 2015
, p.9124
10.1021/acsnano.5b03309
R.C. Longo, R. Addou, Santosh KC, J.-Y. Noh, C.M. Smyth, D. Barrera, C. Chang, J. W.P. Hsu, R.M.Wallace, K. Cho
"Intrinsic air stability mechanisms of two-dimensional transition metal dichalcogenide surfaces: basal versus edge oxidation"
2D Materials
, v.4
, 2017
, p.025050
10.1088/2053-1583/aa636c
R.C. Longo, R. Addou, Santosh KC, J.-Y. Noh, C.M. Smyth, D. Barrera, C. Chang, J. W.P. Hsu, R.M.Wallace, K. Cho
"Intrinsic air stability mechanisms of two-dimensional transition metal dichalcogenide surfaces: basal versus edge oxidation."
2D Materials
, v.4
, 2017
, p.025050
10.1088/2053-1583/aa636c
R.M.Wallace
"High-K Dielectrics: A Perspective on Applications from Silicon to 2D Materials"
ECS Transactions
, v.80
, 2017
, p.17
10.1149/08001.0017ecst
R. Yue, Y. Nie, L. A. Walsh, R. Addou, C. Liang, N. Lu, A. T. Barton, H. Zhu, Z. Che, D. Barrera, L. Cheng, P. Cha, Y. J. Chabal, J. W. P. Hsu, J. Kim, M. Kim, L. Colombo, R. M. Wallace, K. Cho, C. L. Hinkle
"Nucleation and Growth of WSe2: Enabling Large Grain Transition Metal Dichalcogenides"
2D Materials
, v.4
, 2017
, p.045019
10.1088/2053-1583/aa8ab5
S. J. McDonnell and R.M.Wallace
"Atomically-Thin Layered Films for Device Applications based upon 2D TMDC Materials"
Thin Solid Films (Invited Review)
, v.616
, 2016
, p.482
10.1016/j.tsf.2016.08.068
S. McDonnell, C. Smyth, C. L. Hinkle, R.M. Wallace
"MoS2-Titanium Contact Interface Reactions"
ACS Applied Materials and Interfaces
, v.8
, 2016
, p.8289
10.1021/acsami.6b00275
Stephen J. McDonnell and Robert M. Wallace
"(Invited Review) Atomically Thin Films for Device Applications from 2D Layered Materials"
Thin Solid Films
, v.616
, 2016
, p.482
10.1016/j.tsf.2016.08.068
Stephen McDonnell, Christopher Smyth, Christopher L. Hinkle, and Robert M. Wallace
"MoS2?Titanium Contact Interface Reactions"
ACS Applied Materials and Interfaces
, v.8
, 2016
, p.8289
10.1021/acsami.6b00275
(Showing: 1 - 10 of 51)
(Showing: 1 - 51 of 51)
PROJECT OUTCOMES REPORT

Disclaimer
This Project Outcomes Report for the General Public is displayed verbatim as submitted by the
Principal Investigator (PI) for this award. Any opinions, findings, and conclusions or
recommendations expressed in this Report are those of the PI and do not necessarily reflect the
views of the National Science Foundation; NSF has not approved or endorsed its content.
The ability to reduce the size of the basic switch in computers, the transistor, is being seriously challenged. Materials that have been used for decades, such as silicon, are anticipated to soon reach the limit of their performance. This will impact applications where reduced power is needed, along with high speed switching, such as portable electronics and cell phones, as well as larger power intensive operations, like data storage and server centers. The collaborative international team of researchers in this program studied the feasibility of using the ultimate limit for such switches: atomically-thin, two dimensional (2D) layers. The materials studied, called “transition metal dichalcogenides” (TMDs), are unique when produced in atomically thin sheets, and exhibit promising properties that may enable efficient low power, high performance computing that drive the information and communication age. This will be good for society in terms of extended battery life in portable electronics and good for the environment in terms of reducing the total electrical energy consumed by information and communication technologies.
The project, entitled “Understanding the Nature of Interfaces in Two-Dimensional Electronic Devices (UNITE),” brought together leading researchers from the USA, the Republic of Ireland and Northern Ireland, each funded by their respective government agencies. The project provided training to five graduate students and included student exchanges between the Institutes providing a broader scientific and cultural experience.
The project outcomes included a better understanding of how to synthesize high-quality TMD films suitable for electronic applications, as well as the impact of combining these with the materials required to fabricate transistors such as metal contacts and electrical insulating layers. In addition, electrical test device structures and computational models were developed to enable an understanding of the electrical behavior and capabilities of these 2D materials. The major findings are as follows:
- Growth conditions were optimized in order to produce device quality 2D layers resulting in improved transistor speed of operation.
- Test transistor structures and fabrication methods were studied to produce an understanding of the role of electrically active defects in the films and at the material interfaces. Based on this work, conditions were optimized to obtain the best performance.
- The interfacial chemistry of metal contacts and insulators with TMD surfaces were studied to correlate to the transistor electrical behavior. It was found that control of the contact formation through deposition and subsequent annealing was a key factor for optimization. In addition, special treatments to the TMD surfaces are required to enable the formation of usable insulating dielectric layers, which are critical for semiconductor transistors.
Last Modified: 07/15/2018
Modified by: Robert M Wallace
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