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Award Abstract # 1025020
NSEC: Center for Hierarchical Manufacturing

NSF Org: CMMI
Division of Civil, Mechanical, and Manufacturing Innovation
Recipient: UNIVERSITY OF MASSACHUSETTS
Initial Amendment Date: March 2, 2011
Latest Amendment Date: December 29, 2017
Award Number: 1025020
Award Instrument: Cooperative Agreement
Program Manager: Khershed Cooper
khcooper@nsf.gov
 (703)292-7017
CMMI
 Division of Civil, Mechanical, and Manufacturing Innovation
ENG
 Directorate for Engineering
Start Date: April 1, 2011
End Date: September 30, 2018 (Estimated)
Total Intended Award Amount: $20,000,002.00
Total Awarded Amount to Date: $20,315,002.00
Funds Obligated to Date: FY 2011 = $4,300,001.00
FY 2012 = $4,000,000.00

FY 2013 = $4,000,001.00

FY 2014 = $4,000,000.00

FY 2015 = $4,000,000.00

FY 2018 = $15,000.00
History of Investigator:
  • James Watkins (Principal Investigator)
    watkins@polysci.umass.edu
  • Mark Tuominen (Co-Principal Investigator)
Recipient Sponsored Research Office: University of Massachusetts Amherst
101 COMMONWEALTH AVE
AMHERST
MA  US  01003-9252
(413)545-0698
Sponsor Congressional District: 02
Primary Place of Performance: University of Massachusetts Amherst
101 COMMONWEALTH AVE
AMHERST
MA  US  01003-9252
Primary Place of Performance
Congressional District:
02
Unique Entity Identifier (UEI): VGJHK59NMPK9
Parent UEI: VGJHK59NMPK9
NSF Program(s): NANOSCALE: SCIENCE & ENGIN CTR,
NANOMANUFACTURING,
NANTOXICOLOGY,
ENG NNI Special Studies
Primary Program Source: 01001112DB NSF RESEARCH & RELATED ACTIVIT
01001213DB NSF RESEARCH & RELATED ACTIVIT

01001314DB NSF RESEARCH & RELATED ACTIVIT

01001415DB NSF RESEARCH & RELATED ACTIVIT

01001516DB NSF RESEARCH & RELATED ACTIVIT

01001819DB NSF RESEARCH & RELATED ACTIVIT
Program Reference Code(s): 083E, 084E, 1675, 7457, 7475, 7556, 7637, 7681, 9146, 9178, MANU
Program Element Code(s): 167500, 178800, 763700, 768100
Award Agency Code: 4900
Fund Agency Code: 4900
Assistance Listing Number(s): 47.041

ABSTRACT

The Center for Hierarchical Manufacturing (CHM) is a leading research and education center for the development of precision and cost efficient process platforms and tools for the manufacturing of next generation, nanotechnology-enabled devices for electronics, energy conversion, resource conservation and human health. The Center's approach involves the integration of components and systems across multiple length scales using novel nanofabrication processes for sub-30 nm elements based on directed self-assembly, additive-driven assembly, nanoimprint lithography, and conformal deposition at the nanoscale in combination with either Si wafer-based technologies or high-rate roll-to-roll based production tools. The CHM effort is made comprehensive by research on device design, modeling and prototype testing in functional architectures that take advantage of the specific hierarchical nanomanufacturing capabilities developed by the Center. The research structure consists of three Technical Research Groups (TRGs) and system-level test beds in which the key science, engineering and process barriers to the manufacturing of device nanostructures using the CHM platform tools are identified, systematically addressed and resolved. TRG 1, Nanoscale Materials and Processes, addresses the materials systems and processes necessary for high reliability nanofabrication and supports fundamental research on the CHM's core technologies. TRG 2, Nanoscale Devices, Systems, and Metrology, supports fundamental studies in magnetics, photonics and device design to generate proof-of-concept prototypes that can be assembled using advances from TRG 1 and the CHM's process platforms. TRG 3, Sensors and Environmental Monitoring, is creating new systems for on-chip separations, diagnostics and environmental monitoring. This includes new strategies for tracking nanomaterials in the environment and assessing their toxicity and biodistribution in plant and animal species. The test beds are the heart of process and platform development where promising concepts transition from laboratory results into reliable, rapid, high-yield and transferable methodologies. CHM test beds include a unique a roll-to-roll process facility for self-assembled materials and devices, including custom coating lines for nanohybrid materials and roll-to-roll nanoimprint tools. Test bed demonstration projects include polymer batteries, flexible photovoltaics and nanoporous films for separations. The CHM's fundamental science and test bed efforts incorporate faculty and research professionals at UMass Amherst, Binghamton University, MIT, The University of Michigan, Mount Holyoke College, NIST, The University of Puerto Rico, and Rice University and benefit from collaborations with leading groups in Europe and Asia.

In terms of broader impacts, the implementation of efficient nanomanufacturing strategies that are compatible with Si wafer processing or high-volume roll-to-roll processing will enable the production of high performance computing, memory, sensing and photonic/optically active media and devices as well as nano-enabled products in energy conversion, organic electronics and displays at acceptable cost. Such advances will help to transform our nation?s substantial investment in basic research into products that provide substantial social and economic benefits. In addition, the CHM is the administrative hub of the National Nanomanufacturing Network (NNN). The NNN is a catalyst for U.S. nanomanufacturing-based economic development and research collaboration. It comprises a network of manufacturing facilities and expertise, a dynamic web-based information resource, and a pathway for university-industry-government partnerships. The NNN efforts include InterNano, a freely accessible digital library and information resource on nanomanufacturing. The NNN coordinates, hosts and distributes the outcome of workshops on emerging areas in nanotechnology research, implementation and societal implications. The CHM further serves a broad educational audience, including those in K-12, community college, undergraduate and graduate schools, and the public. The CHM's strategy focuses on training K-12 teachers in nanoscience curriculum, developing re-purposeable educational materials for various audiences and levels, piloting and disseminating nanomanufacturing and nanoscience educational content to community colleges, and enhancing undergraduate and graduate training in nanotechnology. The CHM champions the principle of diverse participation in all of its activities: research, education, outreach and management. A Diversity Team coordinates CHM-wide team efforts to ensure efficient implementation of the Center?s Diversity Strategic Plan.

PUBLICATIONS PRODUCED AS A RESULT OF THIS RESEARCH

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PROJECT OUTCOMES REPORT

Disclaimer

This Project Outcomes Report for the General Public is displayed verbatim as submitted by the Principal Investigator (PI) for this award. Any opinions, findings, and conclusions or recommendations expressed in this Report are those of the PI and do not necessarily reflect the views of the National Science Foundation; NSF has not approved or endorsed its content.

The mission of the Center for Hierarchical Manufacturing (CHM) is to be a leading research and education center for the development of efficient process platforms and versatile tools for nanomanufacturing and the integration of components and systems across multiple length scales. The approach integrates nanofabrication processes for sub-100 nm elements based on directed self-assembly, nanoimprint lithography, direct printing of patterned metal oxide device structures, and conformal deposition at the nanoscale to yield materials and devices with unprecedented performance for applications including computing, energy conversion and storage, advanced optical and photonic materials and human health. The first five years of the CHM (DMR-0531171) included a focus on Si wafer-based technologies and batch processing to impact devices produced using semiconductor industry production platforms.  The second phase of the Center (CMMI-1025020, this award) included a focus on large area and/or high-rate roll-to-roll (R2R)-based production platforms to more closely align the benefits of nanoscale engineering with the acceptable manufacturing costs of commercializable technologies. Together these efforts yielded well over 500 publications in leading journals with over 18,000 citations that documented and disseminated CHM outcomes to the academic and industry communities. The CHM effort was made comprehensive by research on device design, modeling, and prototype testing with functional architectures that take best advantage of the specific hierarchical nanomanufacturing capabilities developed by the Center. The bridge to high-volume process technology was accomplished through collaborations with leading industry partners and with academic centers of excellence, and was demonstrated through system-level test beds.  CHM partnerships with commercial fabrication tool and process suppliers provided a mechanism by which these techniques were distributed for use by the nanomanufacturing community. 

The CHM hosted and facilitated the National Nanomanufacturing Network (NNN). The NNN is a catalyst for nanomanufacturing-based economic development and research collaboration, a network of manufacturing facilities and expertise, a dynamic web-based information clearinghouse, and a pathway for university-industry-government partnerships. Efforts within the NNN included InterNano, a freely accessible digital library and information clearinghouse on nanomanufacturing. The NNN coordinated strategic workshops on emerging areas in nanomanufacturing research and nanoinformatics.

The CHM played a central role in the education and training of large numbers of graduate, undergraduate and K-12 students and post-doctoral fellows from diverse backgrounds who will go on to drive advances in science and technology to benefit the nation and our society.  The work of more than 250 graduate students was supported by the CHM either directly or indirectly through collaboration. The CHM’s strategy included the development of educational materials for various audiences and levels, training K-12 teachers in nanotechnology curriculum development, piloting and disseminating educational content within the U.S. community college community, and deepening undergraduate training in nanotechnology through research experiences.   The CHM ran a highly successful Annual Summer Institute in Nanoscience for K-12 science teachers that provided 9 nanotechnology modules that could be replicated in classrooms throughout our schools.

The CHM collaborated with more than 25 academic institutions and approximately 50 companies and research institutes.  CHM research led to more than 50 patent applications and CHM technology has been licensed in fields ranging from energy storage to advanced optical materials to functional surfaces, is in manufacturing in commercial products, and has yielded several start-up companies. CHM research has catalyzed significant investments in research and facilities that leverage the Center’s funding and advances.  The second phase of CHM funding ($20M, CMMI-1025020) was leveraged more than 2:1 by matching  funds, and federal, industry, and Commonwealth of Massachusetts research programs and investments ($41.5M), thereby multiplying the CHM’s impact.

CHM test-bed activities included the development of R2R tools for nanomanufacturing. CHM advances led to significant capital investments from the Commonwealth of Massachusetts that included a world-class Advanced Print and Roll-to-Roll Manufacturing (APRM) Demonstration Facility through the Center for Personalized Health Monitoring (CPHM) and the Institute of Applied Life Sciences (IALS) at UMass Amherst. This globally unique facility offers cutting edge, state-of-the-art, and, in some cases, one-of-a-kind tools to translate laboratory advances to scaled processes to industry accessible platforms.  As an open access manufacturing demonstration facility, it enables partner companies and institutions a low risk opportunity to explore the scalability of emerging technologies developed at UMass or elsewhere, along with their own developments, to establish viable pathways to products and commercialization.  The APRM is cross-cutting in terms of technologies and applications. As one example it now serves as a node in the NEXTFlex National Network for Manufacturing Innovation Center for the development of next generation printed and hybrid electronics.

CHM advances and establishment of our unique manufacturing demonstration facility have positioned the center for long term sustainability post-NSF funding.  The center now continues as the Institute for Hierarchical Manufacturing (IHM).  Over this past calendar year the IHM realized over $1.1M in Federal support (primarily DOD) and more than $750,000 in industry support derived from advances directly related to CHM research.


Last Modified: 02/07/2019
Modified by: James J Watkins

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