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New Method Monitors Semiconductor Etching As It Happens--With Light


September 28, 2012

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University of Illinois researchers have a new, low-cost method to carve delicate features onto semiconductor wafers using light--and watch as it happens. The technique can monitor a semiconductor's surface as it is etched, in real time, with nanometer resolution. This allows the researchers to create complex patterns quickly and easily, and adjust them as needed.Full Story

Source
University of Illinois at Urbana-Champaign

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