Multimedia Gallery
Tiny Barometer
Tiny Barometer
This tiny barometer can be manufactured by the dozens on a single wafer of silicon.
This work was supported by DARPA under contract number F30602-98-20227 and made use of Engineering Research Center for Wireless Integrated MicroSystems (at the University of Michigan) shared facilities supported by NSF under award EEC 00-96866. To read more about NSF's work with sensors, see the Sensor Revolution Special Report, "Sensor Applications: Industry & Commerce". [One of two related images. See Next Image.] (Date of Image: 2002)
Credit: NSF Engineering Research Center for Wireless Integrated MicroSystems, University of Michigan
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